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Journals
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSNs:
2166-2754, 2166-2746
Alternate Titles
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
Journal of Vacuum Science and Technology. B
Associations/Organizations
Availability
PubMed Central
Fulltext Coverage:
2009-01-01 (v.27) to current
Embargo Period:
12 months
Link:
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